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| MOTOROLA SEMICONDUCTOR TECHNICAL DATA Order this document by MPX4100/D MPX4100 Integrated Silicon Pressure Sensor Manifold Absolute Pressure Sensor On-Chip Signal Conditioned, Temperature Compensated and Calibrated The Motorola MPX4100 series Manifold Absolute Pressure (MAP) sensor for engine control is designed to sense absolute air pressure within the intake manifold. This measurement can be used to compute the amount of fuel required for each cylinder. The small form factor and high reliability of on-chip integration makes the Motorola MAP sensor a logical and economical choice for automotive system designers. Features * 1.8% Maximum Error Over 0 to 85C * Specifically Designed for Intake Manifold Absolute Pressure Sensing in Engine Control Systems * Ideally Suited for Microprocessor Interfacing * Patented Silicon Shear Stress Strain Gauge * Temperature Compensated Over - 40C to +125C * Durable Epoxy Unibody Element * Ideal for Non-Automotive Applications Application Examples * Manifold Sensing for Automotive Systems 1 2 3 BASIC CHIP CARRIER ELEMENT CASE 867-08, STYLE 1 SERIES INTEGRATED PRESSURE SENSOR 20 to 105 kPa (2.9 to 15.2 psi) 0.3 to 4.9 V Output PIN NUMBER Vout Gnd VS 4 5 6 N/C N/C N/C NOTE: Pins 4, 5, and 6 are internal device connections. Do not connect to external circuitry or ground. Pin 1 is noted by the notch in the Lead. VS 3 X-ducer SENSING ELEMENT THIN FILM TEMPERATURE COMPENSATION AND GAIN STAGE #1 2 GND GAIN STAGE #2 AND GROUND REFERENCE SHIFT CIRCUITRY 1 Vout PINS 4, 5 AND 6 ARE NO CONNECTS The MPX4100 series piezoresistive transducer is a state- of-the-art, monolithic, signal conditioned, silicon pressure sensor. This sensor, with its patented transducer, combines advanced micromachining techniques, thin film metallization, and bipolar semiconductor processing to provide an accurate, high level analog output signal that is proportional to applied pressure. Figure 1 shows a block diagram of the internal circuitry integrated on a pressure sensor chip. Figure 1. Fully Integrated Pressure Sensor Schematic Senseon and X-ducer are trademarks of Motorola, Inc. REV 3 Motorola Sensor Device Data (c) Motorola, Inc. 1997 1 MPX4100 SERIES MAXIMUM RATINGS(1) Parametric Overpressure(2) (P1 > P2) Burst Pressure(2) (P1 > P2) Storage Temperature Operating Temperature Symbol Pmax Pburst Tstg TA Value 400 1000 - 40 to +125 - 40 to +125 Unit kPa kPa C C 1. TC = 25C unless otherwise noted. 2. Exposure beyond the specified limits may cause permanent damage or degradation to the device. OPERATING CHARACTERISTICS (VS = 5.1 Vdc, TA = 25C unless otherwise noted, P1 > P2) Characteristic Pressure Range(1) Supply Voltage(1) Supply Current Minimum Pressure Offset(3) @ VS = 5.1 Volts Full Scale Output(4) @ VS = 5.1 Volts Full Scale Span(5) @ VS = 5.1 Volts Accuracy(6) Sensitivity Response Time(7) Output Source Current at Full Scale Output Warm-Up Time(8) Offset Stability(9) (0 to 85C) (0 to 85C) (0 to 85C) (0 to 85C) Symbol POP VS Io Voff VFSO VFSS -- V/P tR Io+ -- -- Min 20 4.85 -- 0.225 4.815 -- -- -- -- -- -- -- Typ -- 5.1 7.0 0.306 4.897 4.59 -- 54 1.0 0.1 20 0.5 Max 105 5.35 10 0.388 4.978 -- 1.8 -- -- -- -- -- Unit kPa Vdc mAdc Vdc Vdc Vdc %VFSS mV/kPa ms mAdc ms %VFSS Decoupling circuit shown in Figure 3 required to meet electrical specifications. MECHANICAL CHARACTERISTICS Characteristic Weight, Basic Element (Case 867) Common Mode Line Pressure(10) Symbol -- -- Min -- -- Typ 4.0 -- Max -- 690 Unit Grams kPa NOTES: 1. 1.0 kPa (kiloPascal) equals 0.145 psi. 2. Device is ratiometric within this specified excitation range. 3. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 4. Full Scale Output (VFSO) is defined as the output voltage at the maximum or full rated pressure. 5. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 6. Accuracy (error budget) consists of the following: * Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range. * Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. * Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25C. * TcSpan: Output deviation over the temperature range of 0 to 85C, relative to 25C. * TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85C, relative to 25C. * Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of VFSS, at 25C. 7. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 8. Warm-up is defined as the time required for the product to meet the specified output voltage after the Pressure has been stabilized. 9. Offset stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test. 10. Common mode pressures beyond specified may result in leakage at the case-to-lead interface. 2 Motorola Sensor Device Data MPX4100 SERIES FLUORO SILICONE GEL DIE COAT DIE P1 WIRE BOND STAINLESS STEEL CAP EPOXY PLASTIC CASE SENSOR OUTPUT (PIN 1) 50 pF 51 k A/D ABSOLUTE ELEMENT P2 SEALED VACUUM REFERENCE LEAD FRAME Figure 2 illustrates an absolute sensing chip in the basic chip carrier (Case 867). A fluorosilicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the sensor diaphragm. The MPX4100A series pressure sensor operating characteristics, and internal reliability and qualification tests are based on use of dry air as the pressure media. Media, other than dry air, may have adverse effects on sensor performance and long-term reliability. Contact the factory for information regarding media compatibility in your application. OUTPUT (Volts) Motorola Sensor Device Data 5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 80 85 90 95 100 105 110 EEEEEEEEEEE EEEEEEEEEEE EEEEEEEEEEE EEEEEEEEEEE Figure 2. Cross Sectional Diagram (Not to Scale) 5.0 4.5 4.0 3.5 3.0 2.5 2.0 1.5 1.0 0.5 0 PROCESSOR DIE BOND Figure 3. Decoupling Filter for Sensor to Microprocessor Interface Figure 3 shows a typical decoupling circuit for interfacing the integrated MAP sensor to the A/D input of a microprocessor. Proper decoupilng of the power supply is recommended. Figure 4 shows the sensor output signal relative to pressure input. Typical, minimum, and maximum output curves are shown for operation over a temperature range of 0 to 85C. (The output will saturate outside of the specified pressure range.) TRANSFER FUNCTION: Vout = Vs* (.01059*P-.152) Error VS = 5.1 Vdc TEMP = 0 to 85C 20 kPa TO 105 kPa MPX4100A MAX TYP MIN Pressure (ref: to sealed vacuum) in kPa Figure 4. Output versus Absolute Pressure 3 MPX4100 SERIES Transfer Function (MPX4100A) Nominal Transfer Value: Vout = VS (P x 0.01059 - 0.1518) +/- (Pressure Error x Temp. Factor x 0.01059 x VS) VS = 5.1 V 0.25 Vdc Temperature Error Band MPX4100A Series 4.0 Temp 3.0 Temperature Error Factor 2.0 1.0 0.0 -40 -20 0 20 40 60 80 100 120 140 - 40 0 to 85 +125 Multiplier 3 1 3 Temperature in C Pressure Error Band 3.0 2.0 Pressure Error (kPa) 1.0 0.0 20 -1.0 - 2.0 - 3.0 Pressure 20 to 105 (kPa) Error (Max) 1.5 (kPa) 40 60 80 100 120 Pressure (in kPa) Error Limits for Pressure 4 Motorola Sensor Device Data MPX4100 SERIES PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE Motorola designates the two sides of the pressure sensor as the Pressure (P1) side and the Vacuum (P2) side. The Pressure (P1) side is the side containing fluorosilicone gel which protects the die from harsh media. The Motorola MPX pressure sensor is designed to operate with positive differential pressure applied, P1 > P2. The Pressure (P1) side may be identified by using the table below: Pressure (P1) Side Identifier Stainless Steel Cap Side with Port Marking Side with Port Attached Side with Port Attached Part Number MPX4100A MPX4100AP MPX4100AS MPX4100ASX Case Type 867-08 867B-04 867E-03 867F-03 ORDERING INFORMATION The MPX4100A series MAP silicon pressure sensors are available in the Basic Element, or with pressure port fittings that provide mounting ease and barbed hose connections. MPX Series Device Type DiT Basic Element Ported Elements Options Oi Absolute, Element Only Absolute, Ported Absolute, Stove Pipe Port Absolute, Axial Port Case Type C T 867-08 867B-04 867E-03 867F-03 Order Number MPX4100A MPX4100AP MPX4100AS MPX4100ASX Device Marking MPX4100A MPX4100AP MPX4100A MPX4100A Motorola Sensor Device Data 5 MPX4100 SERIES PACKAGE DIMENSIONS C R M B -A- N PIN 1 SEATING PLANE 1 2 3 4 5 6 POSITIVE PRESSURE (P1) NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION -A- IS INCLUSIVE OF THE MOLD STOP RING. MOLD STOP RING NOT TO EXCEED 16.00 (0.630). INCHES MIN MAX 0.595 0.630 0.514 0.534 0.200 0.220 0.027 0.033 0.048 0.064 0.100 BSC 0.014 0.016 0.695 0.725 30 _NOM 0.475 0.495 0.430 0.450 0.090 0.105 MILLIMETERS MIN MAX 15.11 16.00 13.06 13.56 5.08 5.59 0.68 0.84 1.22 1.63 2.54 BSC 0.36 0.40 17.65 18.42 30 _NOM 12.07 12.57 10.92 11.43 2.29 2.66 L -T- G F D 6 PL 0.136 (0.005) M J S TA M DIM A B C D F G J L M N R S CASE 867-08 ISSUE N BASIC ELEMENT (A, D) STYLE 1: PIN 1. 2. 3. 4. 5. 6. VOUT GROUND VCC V1 V2 VEX -T- R SEATING PLANE A U L V PORT #1 POSITIVE PRESSURE (P1) NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. DIM A B C D F G J K L N P Q R S U V INCHES MIN MAX 1.145 1.175 0.685 0.715 0.305 0.325 0.027 0.033 0.048 0.064 0.100 BSC 0.014 0.016 0.695 0.725 0.290 0.300 0.420 0.440 0.153 0.159 0.153 0.159 0.230 0.250 0.220 0.240 0.910 BSC 0.182 0.194 MILLIMETERS MIN MAX 29.08 29.85 17.40 18.16 7.75 8.26 0.68 0.84 1.22 1.63 2.54 BSC 0.36 0.41 17.65 18.42 7.37 7.62 10.67 11.18 3.89 4.04 3.89 4.04 5.84 6.35 5.59 6.10 23.11 BSC 4.62 4.93 N -Q- B K 1 2 3 4 5 6 PIN 1 S G D 6 PL 0.13 (0.005) C J -P- 0.25 (0.010) M TQ M F M TP S Q S CASE 867B-04 ISSUE E PRESSURE SIDE PORTED (AP, GP) STYLE 1: PIN 1. 2. 3. 4. 5. 6. VOUT GROUND VCC V1 V2 VEX 6 Motorola Sensor Device Data MPX4100 SERIES PACKAGE DIMENSIONS--CONTINUED C A NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. INCHES MIN MAX 0.690 0.720 0.245 0.255 0.780 0.820 0.027 0.033 0.178 0.186 0.048 0.064 0.100 BSC 0.014 0.016 0.345 0.375 0.300 0.310 0.220 0.240 0.182 0.194 STYLE 1: PIN 1. 2. 3. 4. 5. 6. MILLIMETERS MIN MAX 17.53 18.28 6.22 6.48 19.81 20.82 0.69 0.84 4.52 4.72 1.22 1.63 2.54 BSC 0.36 0.41 8.76 9.53 7.62 7.87 5.59 6.10 4.62 4.93 -B- V PIN 1 PORT #1 POSITIVE PRESSURE (P1) 6 5 4 3 2 1 K S G F D 6 PL M DIM A B C D E F G J K N S V J N E -T- 0.13 (0.005) TB M VOUT GROUND VCC V1 V2 VEX CASE 867E-03 ISSUE D PRESSURE SIDE PORTED (AS, GS) -T- C E A U -Q- NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. DIM A B C D E F G J K N P Q R S U V INCHES MIN MAX 1.080 1.120 0.740 0.760 0.630 0.650 0.027 0.033 0.160 0.180 0.048 0.064 0.100 BSC 0.014 0.016 0.220 0.240 0.070 0.080 0.150 0.160 0.150 0.160 0.440 0.460 0.695 0.725 0.840 0.860 0.182 0.194 MILLIMETERS MIN MAX 27.43 28.45 18.80 19.30 16.00 16.51 0.68 0.84 4.06 4.57 1.22 1.63 2.54 BSC 0.36 0.41 5.59 6.10 1.78 2.03 3.81 4.06 3.81 4.06 11.18 11.68 17.65 18.42 21.34 21.84 4.62 4.93 V N B R PIN 1 PORT #1 POSITIVE PRESSURE (P1) -P- 0.25 (0.010) M TQ M 6 5 4 3 2 1 S K J 0.13 (0.005) M TP S D 6 PL QS F G STYLE 1: PIN 1. 2. 3. 4. 5. 6. VOUT GROUND VCC V1 V2 VEX CASE 867F-03 ISSUE D PRESSURE SIDE PORTED (ASX, GSX) Motorola Sensor Device Data 7 MPX4100 SERIES Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages. "Typical" parameters which may be provided in Motorola data sheets and/or specifications can and do vary in different applications and actual performance may vary over time. All operating parameters, including "Typicals" must be validated for each customer application by customer's technical experts. Motorola does not convey any license under its patent rights nor the rights of others. Motorola products are not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other applications intended to support or sustain life, or for any other application in which the failure of the Motorola product could create a situation where personal injury or death may occur. Should Buyer purchase or use Motorola products for any such unintended or unauthorized application, Buyer shall indemnify and hold Motorola and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that Motorola was negligent regarding the design or manufacture of the part. Motorola and are registered trademarks of Motorola, Inc. Motorola, Inc. is an Equal Opportunity/Affirmative Action Employer. Mfax is a trademark of Motorola, Inc. How to reach us: USA / EUROPE / Locations Not Listed: Motorola Literature Distribution; P.O. Box 5405, Denver, Colorado 80217. 303-675-2140 or 1-800-441-2447 JAPAN: Nippon Motorola Ltd.; Tatsumi-SPD-JLDC, 6F Seibu-Butsuryu-Center, 3-14-2 Tatsumi Koto-Ku, Tokyo 135, Japan. 81-3-3521-8315 MfaxTM: RMFAX0@email.sps.mot.com - TOUCHTONE 602-244-6609 ASIA/PACIFIC: Motorola Semiconductors H.K. Ltd.; 8B Tai Ping Industrial Park, - US & Canada ONLY 1-800-774-1848 51 Ting Kok Road, Tai Po, N.T., Hong Kong. 852-26629298 INTERNET: http://motorola.com/sps 8 MPX4100/D Motorola Sensor Device Data |
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